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Targeted against gas-phase contaminants, Donaldson’s LITHOGUARD and CHEMCORE filters offer a broad range of protection for your critical processes and environments. Selection of appropriate media and filtration filter housing will ensure the highest removal efficiency for your specific contamination control needs.
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CHEMCORE Filters
Donaldsons new CHEMCORE filters are optimized for a high efficient filtration of zones, mini-environments, enclosures and critical tools. With their low pressure drop, these filters ensure a lower usage of filter fan power, resulting in a lower operational costs. CHEMCORE filters are available with standard and high density media, and in a variety of sizes.
ChemCore - General brochure
ChemCore A - Product specification sheet
ChemCore B - Product specification sheet
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LITHOGUARD Filters
The LITHOGUARD filters are optimized for the protection of critical tools, such as lithography tools. The filters are placed inside a LITHOGUARD filtration cabinet located in the sub-fab. Standard BSM and BSMmax filter sizes fit in LITHOGUARD 12, 300, v1.0, and v2.0 filtration cabinets.
BSMmax - Product specification sheet
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Toolmount Filters
The toolmount filters are optimized for the protection of critical tools, such as lithography tools, vertical furnaces, reticle stockers, metrology tools, mask writers and flow benches. The filters are available with a variety of media and in a variety of sizes to fit all major tool mount applications.
Lithoguard filter – Product specification sheet
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Furnace Filters
The Furnace filters provide both chemical and particulate contamination protection for vertical furnace applications.
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LITHOGUARD POU Filters
For pressurized air, clean dry air, or pressurized nitrogen in point-of-use applications, that require extreme high purity environments, Donaldson LITHOGUARD Point of Use (POU) filters are ideal. These filters efficiently remove a particular set of contaminants in a restricted volume within a critical tool.
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Selection of appropriate media will ensure the highest removal efficiency for your specific contamination control needs
LITHOGUARD FILTER MEDIA SELECTION GUIDE (brochure)
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Contaminants
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Media Type
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Ammonia
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Amines
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NMP
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Organics
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Acid Gases
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Silanes Siloxanes
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NIC
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X
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X
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X
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STD
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X
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X
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X
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X
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X
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LSP
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X
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X
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X
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X
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X
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AGR
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X
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X
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X
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X
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BSM
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X
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X
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X
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X
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X
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X
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BSMmax
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X
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X
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X
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X
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X
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X
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