MINNEAPOLIS, MN USA - Oct 1, 2004 — Donaldson introduces the LITHOGUARD-12, a highly efficient, small-footprint cabinet filtration system designed to remove airborne molecular acid, base, organic (VOC) and particle contamination in DUV semiconductor processing.
Configured with 12 BSMmax filters in a 6x2 series, LITHOGUARD-12 maximizes overall media utilization, resulting in higher filtration efficiency and increased capacity compared to previous LITHOGUARD systems.
Model 12 also has the smallest footprint in Donaldson’s LITHOGUARD line, only 33 X 47 inches (850 X 1200 mm).
Although physically small, LITHOGUARD-12 offers maximum of chemical filtration capacity: chemical filter inserts are configured to virtually eliminate the possibility of contaminant breakthrough, and to maximize overall media utilization. The chemical media removes acidic and basic gases, as well as volatile organic compounds (VOC). LITHOGUARD-12 protects optical elements and chemical processes used in the manufacture of semiconductor chips, typically 300 mm wafers, from airborne contamination.
Minimizing cost of ownership (CoO) by more than doubling the chemical filter service life, the LITHOGUARD-12 offers even greater cost reduction opportunities through Donaldson’s exclusive chemical filter refurbishment and used-filter analysis programs.
LITHOGUARD-12 integrates numerous technologies in adsorbtive media development and utilizes Donaldson’s advanced understanding of airflow and materials to offer a system with minimal footprint, high structural integrity, low maintenance and minimal off-gassing characteristics.
To discuss how LITHOGUARD-12 can protect your semiconductor manufacturing, contact any of our sales offices around the world.
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Donaldson Company, Inc., headquartered in Minneapolis, is a leading worldwide provider of filtration systems and replacement parts. Founded in 1915, Donaldson is a technology-driven company committed to satisfying customer needs for filtration solutions through innovative research and development. Donaldson serves customers in the industrial and engine markets including semiconductor manufacturing, microelectronics, dust collection, power generation, compressed air purification, off-road equipment, industrial compressors, and trucks. Our 10,000 employees contribute to the company's success at over 30 manufacturing locations around the world. In fiscal year 2004, Donaldson reported sales of more than $1.4 billion and achieved its 15th consecutive record year. Donaldson is a member of the S&P MidCap 400 Index and Donaldson shares are traded on the New York Stock Exchange under the symbol DCI. Click here for additional company information.
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