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1/1/05
FROM:
Donaldson Company, Inc.
P.O. Box 1299
Minneapolis, Minnesota 55440 USA
(NYSE: DCI)
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FROM:
Donaldson Europe B.V.B.A.
Research Park Zone 1
Interleuvenlaan 1
B-3001 Leuven, Belgium
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CONTACTS:
Pierre Habran (Belgium) +32 16 38 38 11
James Empson (USA) 952-887-3131
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FOR IMMEDIATE RELEASE
DONALDSON INTRODUCES ON-LINE FILTER LIFE ESTIMATOR
For Chemically Adsorptive Filters Used in Semiconductor Fabrication
MINNEAPOLIS, MINNESOTA USA — Donaldson Company, Inc. introduces the Filter Life Estimator, a new web-based tool that enables semiconductor fabs using ASML Lithography Tools to plan filter maintenance schedules based on the contaminant mix in their particular operation. The Life Estimator is accessible via the Donaldson website.
Filtration quality is not the question here, as the Donaldson chemiadsorptive LITHOGUARD filters remove more than 99% of the ammonia, sulfur dioxide, photo-resist solvents (PGME, ethyl lactate, etc) and other VOC’s generated by the semiconductor fabrication process. Rather, filter life is the question – and how long the filter lasts is a function of the contaminant challenge faced by each individual fab.
“Customers are always asking us how long the filters will last,” explained James Empson, Worldwide Product Manager for Donaldson’s Semiconductor Filter Group. “This is a reasonable question but one we can’t answer without knowing their particular mix of acids, bases and condensable organics. The Life Estimator lets the user plug in contaminant levels specific to their own Fab and obtain a reasonable filter life estimate.”
Fabs want to know expected filter life so that they can set up a preventive maintenance filter change-out schedule. Otherwise, the only indicator that the filter is at capacity is disaster – yield loss, or worse, a hazed lens. Rather than take chances with million-dollar fab equipment, most fabs opt to change out the filters at regular intervals. Depending on the mix of contaminants, the interval may be anywhere from 6 to 60 months.
In the Life Estimator screen, the user first selects which ASML tool he has (XT, AT, or PAS). The Life Estimator then identifies which Donaldson filter that tool uses and the airflow it requires. When the user fills in specific levels of acids, bases and condensable organics, the Life Estimator automatically calculates an estimated number of months recommended between filter change-outs. To use the Life Estimator, fabs can go to the Donaldson website and click to register for a password.
“The Life Estimator program is based on Donaldson lab data obtained under controlled conditions,” Empson said. “The Life Estimator does not guarantee a specific filter life length because it can’t calculate the effect of the occasional event (such as spilled ammonia), a change in the contaminant mix over time, or other unanticipated conditions.”
For further details about the Life Estimator, visit www.donaldson.com and type Life Estimator in the search box in the upper right corner, or contact a regional Donaldson sales office:
In the Americas and Asia, email or call 1-952-887-3930
In Europe, Africa, Middle East, email or call +32 16 38 38 11
Donaldson Company, Inc., headquartered in Minneapolis, Minnesota USA, is a leading worldwide provider of filtration systems and replacement parts. Founded in 1915, Donaldson is a technology-driven company committed to satisfying customer needs for filtration solutions through innovative research and development. Donaldson serves customers in the industrial and engine markets including semiconductor processing, microelectronics, power generation, hydraulic systems, dust collection, compressed air purification, off-road equipment, industrial compressors, and the on-road markets for heavy trucks and light vehicles. Our 10,000 employees contribute to the company's success at over 30 manufacturing locations around the world. In fiscal year 2004 (ended 7-31-04), Donaldson reported sales of more than $1.4 billion and grew earnings for the 15th consecutive year. Donaldson is a member of the S&P MidCap 400 Index and Donaldson shares are traded on the New York Stock Exchange under the symbol DCI. Additional company information is available on the company’s website.
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