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Donaldson’s LITHOGUARD® filters and filtration systems protect both process tools and minienvironments from amine, acid and organic gas-phase contaminants.
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Chemical Filtration
Targeted against gas-phase contaminants, Donaldson’s LITHOGUARD filters offer a broad range of protection for your critical processes and environments. Selection of appropriate media and filtration filter housing will ensure the highest removal efficiency for your specific contamination control needs.
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LITHOGUARD Systems
Donaldson LITHOGUARD stand-alone particulate/chemical filtration systems improve both yield and uptime by protecting critical processes & surfaces (lenses, wafers, reticles) that are threatened by resist degradation, lens hazing, corrosion and CD variation. Available in a range of airflows, equipped with our airborne molecular contaminant (AMC) filters, to meet your critical process tool requirements.
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