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Chemical Filters

LITHOGUARD Systems

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Need product specifications? If you don’t find what you want on the following list of downloadable documents, please contact us. We will be glad to send you the information you need.

Chemical Filtration

Evaluating Efficiencies of Gas-Phase Chemical/AMC Filters

BSMmax Chemical Filters - Why Upgrade?

Chemical Filter Media Types

Donaldson Filter Refill Program

Solution for the Prevention of Lens Hazing

Broad Spectrum Media Filters for AMC Removal

LITHOGUARD Filtration

Semiconductor Corporate Capabilites Data Sheet

LITHOGUARD Filter Installation and Refurbishment Instructions

Donaldson Chemcore B

Donaldson Chemcore A

Donaldson LITHOGUARD Point of Use Filters (POU) Data Sheet

Donaldson LITHOGUARD Series

Donaldson LITHOGUARD 12 Chemical Contamination Control

Donaldson ChemCore Advanced AMC Filter

Donaldson LITHOGUARD Filters

White Papers

Why Consider NOx as well as SO2? (SPIE paper 2004)

Acid Gases Removal (SPIE paper 2005)

Advantages of Carbon in Broad Spectrum - White paper

POU Filtration for Optical Elements (SPIE paper 2003)

Protecting the DUV Process - White paper

Characterization and Control of Contamination

Other Product Literature