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If you have questions that are not answered below or by the available data sheets, please contact one of our sales persons to solve your problem.
What contaminants are Donaldson Filters able to remove?
Donaldson filters remove the broadest range of contaminants, including bases (Ammonia, Amines, NMP), acids (SO2, H2S), and non-polar organics (Silanes, organophosphates, hydrocarbons, pthalates and anti-oxidants such as BHT). If you would like specific information for a contaminant please contact your sales representative.
How long will the filter last?
Filter life is dependent upon the amount of contaminant that is being put through it. If you know the airflow and the contaminant concentration contact your Donaldson Sales Representative and they can provide a filter life expectancy.
What is the difference between filters in a series flow and parallel flow?
Series flow means that the air passes through several filters in order to reach the required level of filtration. Parallel flow means that the air stream is divided and passes once through the filter to reach the required level of filtration. Donaldson’s filtration effectiveness allows the highest level of efficiency in a single pass.
What about filter offgassing?
All materials are low offgassing. Donaldson’s chemists and engineering department continuously seek to improve the performance of the materials used in our filters for each semiconductor application.
Why do I need to worry about contaminants other than ammonia?
Ammonia has long been identified as a contaminant in the fab and is easily removed, but as technology improves there has been a wealth of evidence that shows that NMP, acids, and non-polar organics (to name a few) are negatively effecting tools and processes causing down time and lower yield rates
Why does Donaldson still use carbon when there is so much new technology available?
Donaldson is the world leader in air filtration. We have done extensive testing on other types of filtration media, such as ion exchange resin and a number of catalysts. However, the highly porous structure of activated carbon remains the most effective material for adsorbing non-polar airborne molecular contaminants problematic in the lithographic environment. The biggest problem with the use of activated carbon is weight & pressure drop.
So why doesn’t ChemCore contain carbon?
ChemCore complements Donaldson’s carbon-based filters by introducing active absorbent chemistry into the air stream for the control of acidic and basic gases in the lightest and lowest pressure drop format.
How does Donaldson assure quality of their filters before they are shipped?
Donaldson’s quality control procedures include numerous tests that are done to each filter to ensure that each filter will meet our high standards and give the level of quality that people expect from Donaldson.
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